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一种高真空零部件放气率测试装置的研制

Development of an Outgassing Rate Measuring Device for Specialized High Vacuum Components

  • 摘要: 材料的真空放气特性是聚变装置需重点研究和关注的内容。为了研究大尺寸组件在聚变装置真实运行环境下的放气特性,基于对称结构流导法针对性设计研制了一套放气率测试装置,该装置能模拟聚变装置烘烤温度条件(室温~300℃)且测量范围覆盖(10−5~ 10−9) Pa·m3·s−1量级。此外,重点针对样品室的加热、冷却系统进行热仿真验证以确保零部件在放气率测试时能模拟其在托卡马克真空室内烘烤过程中的温升工况。装置样品室尺寸为φ500 mm×600 mm,主体材料使用SUS316L不锈钢且内表面采用超高真空工艺处理。样品室设计有加热平台和真空室外壁的联合加热模块,以实现对被测样品25℃~300℃的加热;样品室隔热层外侧设有水冷系统以保障降温效率和人员接触安全性。对样品室的烘烤、冷却设计进行热仿真分析发现:隔热层起到了有效的保温隔热作用,内外层温差近150℃;水冷系统起到显著的降温效果,使人员接触的最外层区域温度不超过55℃;在联合加热模式下的升温效率和加热能力优于仅使用样品台热传导升温。初步测试表明,装置可实现稳定的可控烘烤性能,本底放气成分分析表明该装置本底清洁运转良好,可以满足聚变装置零部件的放气率测试要求。

     

    Abstract: The vacuum outgassing of materials is a critical concern of fusion devices. In order to study the outgassing characteristics of large-scale components in the actual operational environment of the fusion device, an outgassing rate measuring device was designed and developed based on the symmetrical structure constant conductance method, which can simulate the baking conditions of the fusion device and the measuring range covers (10−5~10−9) Pa·m3·s−1. Moreover, thermal analysis simulations were conducted to verify the heating and cooling system of the sample chamber, ensuring that the components can replicate the temperature increase experienced during baking in a tokamak vacuum chamber for their outgassing testing. The size of the sample chamber is φ500 mm × 600 mm, and the main structure material is SUS316L, with the inner surface treated by ultra-high vacuum technology. The sample chamber achieves heating within the range of 25℃ to 300℃ using a combined heating mode, incorporating a heating platform and the outer wall of the vacuum chamber. A water-cooling module is designed on the exterior of the sample chamber insulation to ensure cooling efficiency and personnel contact safety. The thermal simulation analysis of the baking and cooling module of the sample chamber indicates that the heat insulation layer effectively preserves and insulates heat, with a temperature difference of nearly 150℃ between the inner and outer layers. The water-cooling system provides a significant cooling effect, ensuring that the temperature of the outermost area touched by personnel remains below 55℃. The preliminary test indicates that the device can achieve stable and controllable baking performance, and the analysis of device background outgassing reveals its effective and clean operation, meeting the outgassing test requirements for specialized fusion device components.

     

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