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王峰, 许高斌, 尹盛华, 季旭, 冯建国. 高谐振频率梳齿轴对称结构的MEMS扫描镜[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202401006
引用本文: 王峰, 许高斌, 尹盛华, 季旭, 冯建国. 高谐振频率梳齿轴对称结构的MEMS扫描镜[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202401006
WANG Feng, XU Gaobin, YIN Shenghua, JI Xu, FENG Jianguo. MEMS Scanning Mirror with High Resonant Frequency Comb Axisymmetric Structure[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202401006
Citation: WANG Feng, XU Gaobin, YIN Shenghua, JI Xu, FENG Jianguo. MEMS Scanning Mirror with High Resonant Frequency Comb Axisymmetric Structure[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202401006

高谐振频率梳齿轴对称结构的MEMS扫描镜

MEMS Scanning Mirror with High Resonant Frequency Comb Axisymmetric Structure

  • 摘要: 针对静电驱动MEMS扫描镜存在谐振频率低、驱动电压较高等缺点,提出了一种具有高谐振频率、低驱动电压的二维MEMS扫描镜。该扫描镜采用轴对称分布的交错型垂直梳齿结构,通过对该器件进行了理论分析,建立了理论模型;利用COMSOL仿真软件对扫描镜做静态和动态的分析验证,结果表明梳齿轴对称结构在偏转时能提供更大的驱动力矩,同时避免传统梳齿的不平衡运动带来的干扰;扫描镜在12 V和16 V的正弦波电压驱动下,快轴和慢轴的谐振频率分别为11657 Hz、6122.4 Hz,相对应的机械偏转角为5.9°、6.6°;此外,扫描镜的两轴谐振频率相差较大,能够有效抑制两种运动状态的相互干扰。最后设计一套适用于该器件的制备工艺。

     

    Abstract: Aiming to address the drawbacks of electrostatic-driven MEMS scanning mirrors, such as low resonant frequency and high driving voltage, a novel two-dimensional MEMS scanning mirror with improved resonant frequency and reduced driving voltage is proposed. The scanning mirror adopts an interleaved vertical comb structure with axisymmetric distribution. Through the theoretical analysis of the device, the theoretical model is established. COMSOL simulation software is employed for static and dynamic analysis to verify the performance of the scanning mirror. The results demonstrate that the comb axisymmetric structure can provide greater driving torque during deflection, while avoiding the interference caused by the unbalanced motion of the traditional comb. Under the sine wave voltage of 12 V and 16 V, the resonant frequencies of the fast axis and the slow axis are 11657 Hz and 6122.4 Hz, respectively, and the corresponding mechanical deflection angles are 5.9° and 6.6°. Furthermore, a significant disparity between the resonant frequencies of both axes effectively suppresses mutual interference between their respective motion states. Finally, a set of fabrication processes suitable for this device has been designed.

     

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