高级检索
曾志德, 卢凌峰, 王超, 李智, 肖晨雨, 刘灏, 苌磊. 基于局域发射光谱的LEAD装置螺旋波等离子参数测量[J]. 真空科学与技术学报, 2024, 44(8): 720-727. DOI: 10.13922/j.cnki.cjvst.202401002
引用本文: 曾志德, 卢凌峰, 王超, 李智, 肖晨雨, 刘灏, 苌磊. 基于局域发射光谱的LEAD装置螺旋波等离子参数测量[J]. 真空科学与技术学报, 2024, 44(8): 720-727. DOI: 10.13922/j.cnki.cjvst.202401002
ZENG Zhide, LU Lingfeng, WANG Chao, LI Zhi, XIAO Chenyu, LIU Hao, CHANG Lei. Measurement of the Helicon Plasma Parameters in LEAD Based on Local Optical Emission Spectroscopy[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(8): 720-727. DOI: 10.13922/j.cnki.cjvst.202401002
Citation: ZENG Zhide, LU Lingfeng, WANG Chao, LI Zhi, XIAO Chenyu, LIU Hao, CHANG Lei. Measurement of the Helicon Plasma Parameters in LEAD Based on Local Optical Emission Spectroscopy[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(8): 720-727. DOI: 10.13922/j.cnki.cjvst.202401002

基于局域发射光谱的LEAD装置螺旋波等离子参数测量

Measurement of the Helicon Plasma Parameters in LEAD Based on Local Optical Emission Spectroscopy

  • 摘要: 发射光谱法是常见的用于诊断等离子体的光学诊断技术,然而,这项技术并不能在空间上分辨等离子体。为了以低成本得到高空间分辨率的等离子体参数,发展了局域发射光谱法。这是一种将光纤伸入等离子体中以采集光纤前端等离子体光谱学信息的高空间分辨率光学诊断技术。介绍了局域发射光谱法技术的原理,并在大型线性等离子体实验装置LEAD上用蚊香形射频天线激发了氩等离子体,并在不同的射频功率和径向位置下对比了局域发射光谱法测得的等离子体光强和朗缪尔探针测得的等离子体电子密度,同时观察到了在射频功率500 W左右等离子体从感性耦合放电模式到螺旋波模式的跳变。结果表明:局域发射光谱法测得的光强与实验室现有的朗缪尔探针测量的电子密度之间较强的正相关,证明了用光强表征电子密度的可靠性,和LEAD装置上现有的朗缪尔探针在不同的等离子体模式的诊断上互补。

     

    Abstract: Optical emission spectroscopy (OES) is a widely used optical technique for diagnosing plasma parameters; however, OES cannot spatially resolve plasma. In order to obtain plasma parameters with high spatial resolution at low cost, local optical emission spectroscopy (LOES) was developed. It can achieve a high spatial resolution by inserting optical fiber into the plasma to collect spectroscopic data emitted from a hole in the front of the optical fiber. The principle of LOES technology is introduced. Argon plasma is excited by mosquito-repellent incense radio frequency (RF) antenna on a linear experimental advanced device (LEAD), and the light intensity of plasma measured by LOES and electron density of plasma measured by Langmuir probe (LP) under different RF power and radial position is compared. The transition of plasma from inductively coupled (ICP) mode to helicon mode was observed at an RF power of about 500 W. The results show that there is a positive correlation between the light intensity measured by LOES and the electron density measured by the Langmuir probe in our laboratory. It proves the reliability of using light intensity to characterize electron density, and is complementary to the existing LP on LEAD in the diagnosis of different plasma modes.

     

/

返回文章
返回