Abstract:
Turbomolecular pumps with traditional straight blade structures face new development opportunities and challenges in the background of high rotational speeds. In order to break through the bottleneck problem of “the pumping speed stops increasing as the turbine rotational speed reaches a certain level, as if it has entered a saturation state” currently encountered, this article starts from the basic principles of molecular gas dynamics and uses Monte Carlo method to analyze the new changes brought by the increase in turbine rotational speed on the pumping mechanism of turbomolecular pumps. It was found that the traditional straight blade structure and pumping mode did not match the current high rotational speed, which limited the improvement of pumping speed. The application background of high rotational speed also provided possibilities for the improvement of its pumping performance. Theoretical analysis and research have found that setting twisted blades that vary with the blade radius in a turbine blade row is the only way to break through the bottleneck. The fundamental reason for setting twisted blades is discussed. The design concept of small angle and the geometric modeling method of new twisted blades are proposed to achieve the design and solution of the optimal blade row structure and provide theoretical basis and technical support for the development of high-performance and high adaptability turbomolecular pumps. It also provides a direction for the structural optimization design of future turbomolecular pumps.