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姚龙, 姜琴, 侯丽丽. 基于幅−相检测双频自动阻抗匹配器仿真分析[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202310006
引用本文: 姚龙, 姜琴, 侯丽丽. 基于幅−相检测双频自动阻抗匹配器仿真分析[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202310006
YAO Long, JIANG Qin, HOU Lili. Analysis of Dual Frequency Automatic Impedance Matcher Based on Amplitude-Phase Detection[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202310006
Citation: YAO Long, JIANG Qin, HOU Lili. Analysis of Dual Frequency Automatic Impedance Matcher Based on Amplitude-Phase Detection[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202310006

基于幅−相检测双频自动阻抗匹配器仿真分析

Analysis of Dual Frequency Automatic Impedance Matcher Based on Amplitude-Phase Detection

  • 摘要: 先进半导体制程中需要对等离子体离化率和轰击能量进行精准控制,传统单频系统难以实现上述目标,进而提出复频信号控制。基于对双频射频电源系统的进一步需求,开发双频匹配器以便实现在不同频率下的阻抗匹配具有重要的意义。本文基于二极管幅−相检测电路,设计一款双频自动阻抗匹配器电路,并分别进行检测模组、匹配架构以及寻优算法等相关机理分析。通过研究表明,Urms可以表征射频电源与腔室之间的匹配程度,Urms越大表征失配程度越大,反之匹配程度越好。针对13.56 M和400 kHz信号分别采用Gama型和T型匹配网络进行匹配输出,仿真结果表明该结构具有很好的传输特性,理论插损小于−0.002 dB以及较高的隔离度,理论隔离度−34.4dB。同时,轮换寻优算法,具备响应速度快,匹配精度高等特性,可以利用轮换调谐的方式高效实现射频源和腔室之间的阻抗匹配。

     

    Abstract: In the advanced semiconductor process, it is necessary to precisely control the plasma ionization rate and ion impact energy, and the traditional single-frequency power supply makes it difficult to achieve the above goals, so a dual-frequency is proposed. It is of great significance to develop dual frequency matchers in order to achieve impedance matching at different frequencies. This article designs a dual frequency automatic impedance matcher based on a diode amplitude-phase detection circuit. Simulation research shows that Urms can represent the matching degree between the RF power and the chamber; the greater the Urms, the greater the degree of mismatch, and vice versa, the better the matching degree. Gama and T-type matching networks are used for matching outputs of 13.56 M and 400 kHz signals, respectively. Simulation results show that the structure exhibits excellent transmission characteristics, with a theoretical insertion loss of less than −0.002 dB and high isolation, with a theoretical isolation of −34.4 dB. The optimization algorithm has the characteristics of fast response and high matching accuracy, and uses this method to achieve impedance matching between the RF source and the chamber.

     

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