Abstract: In low-temperature environments, the temperature difference between the two sides of tempered vacuum glass can cause bending, deformation, and even failure. Based on this problem, this study uses a combination of experimental research and numerical analysis to establish a thermo-mechanical model of the tempered vacuum glass in a low-temperature environment, which reveals the mechanism of cooperative deformation process of tempered vacuum glass under temperature variations between the two sides. The results of the numerical simulations are compared with the results of the low-temperature deformation test to verify the credibility of the thermo-mechanical model of the tempered vacuum glass. Simultaneously, this study conducts simulations and analyses on the deformation of tempered vacuum glass of varying sizes under different low-temperature temperature difference situations. The objective is to examine the influence of size and temperature differences on the characteristics of deformation of tempered vacuum glass. The results show that the relative error between the low-temperature deformation test and the numerical simulation results is within 2%, and the thermomechanical model used for the tempered vacuum glass is considered credible. The deformation of tempered vacuum glass at low temperatures is proportional to the temperature difference. The deformation increases with the size ratio at the same temperature difference; it has some theoretical significance and practical value for the promotion and industrialization of toughened vacuum glass in extremely cold regions.