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多级努森真空泵能效分析

Energy Efficiency Analysis of Multistage Knudsen Vacuum Pump

  • 摘要: 基于热流逸效应工作的努森真空泵相较于传统真空泵,因具有无运动部件且结构简单的优点而倍受关注,其应用通常采用多级串联结构。文章以努森真空泵能耗和效率模型为基础,着重考虑级数与热量传递和压力分配的关系,建立了多级努森真空泵气体工质流态处于过渡流时的能耗(热流比)与运行效率模型,进而研究了影响热流比及运行效率与级数、努森数、压比、温差等参数的关系。结果表明,努森数从0.2增至8,对应的最优级数从118级减少至15级;压比从2增至100,对应的最优级数从12级增加至77级;温差从50 K增至350 K,对应的最优级数从68级减少至15级。努森数(温差)越大、或压比越小,热流比就越低(运行效率就越高)且对应的最优级数就越小,所需的最小级数也越少。若从能效优化的角度来设计多级努森真空泵,需综合考虑努森数、压比和温差的影响,确定最优级数范围。

     

    Abstract: Compared to traditional vacuum pumps, the Knudsen vacuum pump, based on the thermal transpiration effect, is paid lots of attention to because of the advantages of no moving parts and simple structure. The Knudsen vacuum pump is commonly used by type of many unit pumps in series. According to the energy consumption and efficiency model of the single-stage Knudsen vacuum pump and focusing on the relationship of the number of stages with heat transfer and pressure distribution, energy consumption (heat requirements per pumped molecule) and operation efficiency model are established for multistage Knudsen vacuum pump when the pumped gas medium is in transition flow regime. Furthermore, the investigation is carried out on correlations between heat requirements per pumped molecule and operating efficiency and those parameters such as number of stages, Knudsen number, pressure ratio and temperature difference. The results show that as the Knudsen number increases from 0.2 to 8, the corresponding optimum number of stages decreases from 118 to 15. As the pressure ratio increases from 2 to 100, the corresponding optimum number of stages increases from 12 to 77. As the temperature difference increases from 50 K to 350 K, the corresponding optimum number of stages decreases from 68 to 15. The larger the Knudsen number (temperature difference) or the smaller the pressure ratio, the lower the heat requirements per pumped molecule (the higher the operating efficiency) and the smaller the corresponding optimum number of stages as well as the minimal number of stages required. Considering the design of a multistage Knudsen vacuum pump from the perspective of energy efficiency optimization, it is necessary to take into account the comprehensive effects of Knudsen number, pressure ratio and temperature difference in order to determine the range of optimum number of stages.

     

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