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热解法在氮化硼基底上沉积碳膜衰减器的工艺研究

Deposition of Carbon Film Attenuator on Boron Nitride Substrate by Pyrolysis

  • 摘要: 螺旋线行波管是一种应用较为广泛的宽频带、高增益行波功率放大器件。衰减器是提高管子性能稳定性的关键部件之一。它不仅可以吸收在管子输入、输出端及切断端传输介质的变化引起的反射波,抑制反射波和向前波叠加引起的自激振荡;而且,可以减小传输电路在输入、输出端及切断端产生的阻抗不匹配的影响,扩宽行波管有效传播的频带宽度;同时可以避免陶瓷杆的上的电荷积累造成的放电或电弧。文章通过低压真空热解正庚烷,调整加热场热子温度、加热时间、腔室气压、气体流动等因素,制备出了满足螺旋线行波管设计要求的碳膜衰减器。主要阐述和验证了碳膜衰减器制备过程中从选材到制备过程中的工艺要求及各因素对碳膜衰减器阻值的影响,为螺旋线行波管碳膜衰减器的制备提供了实验依据。

     

    Abstract: Helix traveling wave tube is widely used in wideband and high gain traveling wave power amplifier devices. The attenuator is one of the key components to improve the stability of the tube performance. It can not only absorb the reflected wave caused by the change of transmission medium at the input, output and termination of the tube, but also suppress the self-oscillation caused by the superposition of the reflected wave and the forward wave; moreover, it can reduce the influence of impedance mismatch generated by the transmission circuit at the input, output and cut-off end, and expand the effective propagation frequency band width of the traveling wave tube. At the same time, discharge or arcing caused by charge accumulation on the ceramic rod can be avoided. This paper mainly expounds on the process requirements from material selection to the preparation process of carbon film attenuators. By adjusting the temperature, heating time, chamber air pressure, and gas flow factors, the carbon film attenuator that meets the design requirements of the helix traveling wave tube is prepared.

     

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