Abstract: Fluorocarbon polymer coatings are prepared on the surface of copper-plated gold PCB by the PECVD method. AFM is used to characterize the surface morphology of the coatings prepared at different deposition times and deposition platform temperatures. The process dependence of the coatings is analyzed by the measurements of water contact angle and adhesion. The results show that when the deposition platform temperature is lower (50℃) and the deposition time is 10−15 min, the surface of the coating is smooth, the water contact angle on the coating can be 121°, and the adhesion to the PCB is better.