Abstract: In order to further expand the action area of the plasma jet and realize precise sterilization in a specific range, a sterilization device with three degrees of freedom motion platform equipped with a plasma jet tube and machine vision is designed. The device recognizes the sterilized parts through machine vision, and the control system controls the movement of the three degrees of freedom motion platform according to the visual information to realize accurate sterilization. The control accuracy is ± 0.2 mm. When the distance between the jet tube and the Petri dish is 3 mm and the moving speed of the platform is 2 mm/s, there is a significant sterilization effect. At the height of 3 ~ 5 mm, the slower the moving speed of the three degrees of freedom motion platform, the higher the sterilization rate. The device uses a single jet pipe to realize more targeted sterilization in a larger area, greatly reducing the sterilization cost and more accurate scope of action.