Abstract: In view of the current gap in precision vacuum coating equipment technology between domestic and foreign countries, there are problems such as lack of core technology, unclear direction of technology development, and lack of willingness to research and develop, we analyzed the domestic and foreign patents information of vacuum coating equipment based on visualization technology. In the process of exploring data processing, field creation and combination are used to visually analyze the current patent situation and technology, focusing on the technical concerns of foreign key equipment manufacturers of magnetron sputtering(MS) in optical field and atomic layer deposition(ALD) in semiconductor field under the background of technical barriers. Mining competitive information such as patent layout of key components, technical efficacies, patent blanks and comparative advantages. Visualized images such as Sankey diagrams, physical diagrams, and clustered bubble diagrams are used to visually display the analysis results, in order to provide reference strategies for domestic vacuum coating equipment manufacturing enterprises to learn from technological innovation ideas, corporate mergers and acquisitions, technical cooperation, talent introduction, and industry-related policy formulation.