大口径电润湿液体透镜
Large Aperture Electrowetting-Based Liquid Lens
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摘要: 电润湿液体透镜的发展打破了传统变焦系统的种种限制,其优点也越来越受到大家的重视,成为了国内外的热点和重点研究方向。本文提出了一种大口径电润湿液体透镜,采用上下电极组合而成的圆筒形腔体设计,并阐释了其工作原理,同时给出了其制作流程。在研制填充透镜的电润湿液体时,提出了一种对电润湿导电液体分类的模型。本文提出的电润湿液体透镜口径为8 mm,聚一氯对二甲苯介电层厚度为3μm,填充液体密度相同,折射率差为0.1581,并在真空箱中抽取液体中的气泡,以油浸封装的工艺确保透镜密封性。透镜的阈值电压约为60 V,当施加电压为60 V至120 V时,电润湿液体透镜的最小焦距约为-68.73 mm,最大焦距接近无穷,继续增大电压,至200 V时击穿,此时,透镜极限的变倍比为1.8。整个变倍过程中,透镜具有良好的成像质量。Abstract: The development of electrowetting-based liquid lens can break the limitations of the traditional zoom system, and its advantages have been paid more attention.Meanwhile, it has become a hot spot and key research direction at home and abroad.In this paper, we propose a large-aperture electrowetting-based liquid lens with a cylindrical cavity design using a combination of upper and lower electrodes.We explain its working principle and give its fabrication process.In developing the electrowetting liquid, a model for classifying the electrowetting conductive liquid is proposed.The electrowetting-based liquid lens proposed in this paper has an aperture of 8 mm,a Parylene C dielectric layer thickness of 3 μm, filled with the same density of electrowetting liquid with a refractive index difference of 0.1581, and the air bubbles in the liquid are extracted in a vacuum chamber.The liquid lens is sealed by an oil-immersion encapsulation process to ensure the hermeticity of the lens.The threshold voltage of the liquid lens is 60 V, and the minimum focal length of the liquid lens is about-68.73 mm and the maximum focal length is close to infinity when the applied voltage is changed from 60 V to 120 V; the voltage is continuously increased to 200 V when it breaks down, at this time, the lens limit of the zoom ratio is 1.8.The lens has good imaging quality throughout the entire zoom process.