分子真空泵研究进展
Research Progress of Molecular Vacuum Pump
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摘要: 分子真空泵作为重要的清洁高真空、超高真空获得设备,因其工作稳定可靠,在分子流态下具有很好的抽气效率,在科学仪器、工业生产设备中得到广泛应用。近年来,随着数控加工手段、磁悬浮轴承技术、模拟计算方法的广泛采用,为分子真空泵性能的进一步提升创造了条件。本文针对分子真空泵设计计算中涉及的基础性问题,以结构改进和抽气性能计算为主要内容,对分子真空泵的研究进展和未来发展进行了总结与展望,供研究者和生产者参考。Abstract: Molecular vacuum pump is a kind of vacuum devices for producing and maintaining clean high/ultra-high vacuum conditions, and widely used in industrial and scientific applications duo to its high operating reliability and pumping performances. Recent years, the development of numerical control machining, active magnetic bearings and simulation methods, make it possible to improve the pumping performances of molecular vacuum pump even further. This paper summarizes the research progress based on the basic issues of molecular vacuum pump design and prospects for future developments of the prediction accuracy of pumping performances at high blade speeds.