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电子辐照介质材料二次电子发射系数与能谱测量数据库

Database of Secondary Electron Yield and Energy Spectra for Dielectric Samples by Electron Irradiation

  • 摘要: 电子辐照电介质材料的二次电子发射特性是影响各类真空电子器件与设备性能的重要参数,本文对电子束辐照下二十余种常用的典型介质材料的二次电子发射特性进行了实验测量研究。采用收集极负偏压法测量二次电子发射系数(SEY),通过给二次电子收集极加载不同的偏压来引导二次电子的运动,实现对积累电荷的中和,实验获得了介质材料的SEY随着入射电子能量变化的曲线,以及SEY最大值σmax、第一、第二临界能量E1E2等特征参数。采用高分辨率筒镜型电子能谱仪测量了电子束脉冲序列辐照介质材料的二次电子能谱,得到不同入射电子能量条件下的二次电子能谱分布曲线,以及真二次电子峰半高宽参数。通过实验测量建立了常用介质材料二次电子发射特性数据库,该结果将为介质材料二次电子发射的各类应用提供重要参考。

     

    Abstract: Characteristics of secondary electron emission from dielectric materials by electron irradiation are critical to the performance of vacuum electronic devices and equipment. In this work,secondary electron yield(SEY)and energy spectra were measured for 22 kinds of dielectric samples. By the negatively biased secondary electron collector for neutralizing charges accumulated in the sample during electron irradiation,SEY was measured by using a single pulsed electron gun. Secondary electron spectra at different primary energy of electrons were obtained by a high resolution electron spectrometer in successive electron pulse irradiation. Parameters describing the SEY curves as the maximum SEY σmax,the first and secondary cross energy E1 and E2,and the full width at half maxima(FWHM)of true secondary electrons in the spectra were given. Based on the measurements,the database of secondary electron yield and spectra for typical dielectric samples was established,which could provide valuable information to related applications.

     

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