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溅射Ni和Ni/Al对SiC陶瓷真空钎焊性能的影响

Effect of Sputtered Ni and Ni/Al on Vacuum Brazing Performance of SiC Ceramics

  • 摘要: 本工作采用磁控溅射的方法在SiC陶瓷表面分别溅射Ni薄膜和Ni/Al双层薄膜,然后将表面改性的SiC陶瓷片用真空钎焊的方法制备了以Al为钎料的钎焊接头,研究了表面溅射Ni和Ni/Al对SiC真空钎焊接头界面结合的影响。结果表明,表面溅射Ni薄膜的SiC钎焊接头平均剪切强度为69.4 MPa,表面溅射Ni/Al薄膜的SiC钎焊接头平均剪切强度为113.8 MPa,均高于未改性处理的SiC钎焊接头的平均剪切强度(48.4 MPa),其原因在于SiC表面溅射沉积Ni和Ni/Al薄膜,一方面能够避免脆性反应相Al4C3的生成对界面结合强度的降低,另一方面有助于改善铝钎料对SiC陶瓷表面的润湿。另外,相比于溅射单层Ni薄膜,采用Ni/Al双层薄膜改性的SiC钎焊接头,由于界面生成的强化相Al3Ni分布更为集中,起到了“锚定”钎缝的作用,使接头剪切强度得到了更大的提高。

     

    Abstract: In this work,Ni film and Ni/Al double-layer thin film were sputtered on the surface of SiC ceramics by magnetron sputtering,and then the brazed joint with Al as filler metal was prepared by vacuum brazing. The effect of Ni and Ni/Al sputtered on the interface bonding of SiC vacuum brazed joint was studied. The results show that the average shear strength of SiC brazed joint sputtered with Ni film is 69.4 MPa,and that of SiC brazed joint sputtered with Ni/Al film is 113.8 MPa,both are higher than that of unmodified SiC brazed joint(48.4 MPa). The reason is that Ni and Ni/Al films are deposited on the SiC surface by sputtering. On the one hand,it can avoid the reduction of interfacial bonding strength caused by the formation of brittle reaction phase Al4C3;on the other hand,it is helpful to improve the wettability of aluminum solder on SiC surface. In addition,compared with sputtered single-layer Ni film,the shear strength of SiC brazed joint modified by Ni/Al double-layer film is greatly improved because the distribution of Al3Ni phase is more concentrated,which plays the role of "anchoring" the weld.

     

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