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螺旋波等离子体研究进展

Recent Progress on Helicon Plasma

  • 摘要: 螺旋波等离子体为目前能产生最高等离子体密度的低温等离子体源之一,在低温等离子体应用领域中备受关注。螺旋波等离子体源具有电离效率高、电子密度高、约束磁场低、结构相对简单、可在极低气压下放电等优点,使其在集成电路工艺、薄膜沉积、刻蚀、表面改性和等离子体宇航推进等领域有着广泛的应用前景。本文综述了近年来螺旋波等离子体的主要研究进展,包括螺旋波等离子体的基本原理、耦合机制、低场峰现象、双电层结构等放电特性以及推进机制的研究进展,在此基础上展望了螺旋波等离子体未来的发展方向。

     

    Abstract: Helicon plasma, one of the plasma sources producing highest density, is attracting tremendous interest in low temperature plasma application field. Helicon plasma has many advantages, such as high ionization efficiency, high electron density, low confined magnetic field, relatively simple structure, discharge in low pressure.Based on these features, the helicon plasma has a wide range of applications in integrated circuit technique, thin film deposition, etching, surface modification, plasma aerospace propulsion. This paper reviewed the recent progress on helicon plasma in current years on its basic theory, coupling mechanism, low field peak phenomenon, electric double layers(DLs) and the helicon plasma propulsion mechanism, and then the future development direction of helicon plasma was proposed.

     

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