Effect of Oxygen Flow Rate on the Preparation and Performance of New High Barrier Film Materials
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摘要: 利用真空反应蒸发镀膜技术在PET(聚对苯二甲酸乙二醇酯)表面沉积AlOx+Al+AlOx三层镀层,通过改进传统蒸发镀膜设备,增添匀气管,控制氧气通入位置及流量,研究了氧气流量对膜层形貌、膜层结合力和阻隔性的影响。采用扫描电子显微镜、能谱仪、3M标准胶带、透氧仪等测试仪器对膜层形貌和表层元素进行了表征和分析,并得到最佳工艺条件。结果表明:改进设备后沉积的AlOx+Al+AlOx/PET复合膜,可以有效的提高薄膜的阻隔性、致密性以及镀层与薄膜间的结合力。在本底真空8×10-4Pa、反应气压1×10-2Pa、电流80 A、过渡层氧气流量50 m L/min、盖层充气流量100 m L/min等工艺下蒸镀的AlOx+Al+AlOx/PET复合膜,膜层薄膜的结合力为1.52 N/mm,氧气透过率为1.1 cm3/(m2·day·atm),与传统铝膜相比,结合力提高2倍,阻隔性提高4.5倍。
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关键词:
- 真空反应蒸发镀膜技术 /
- AlOx+Al+AlOx/PET复合膜 /
- 氧气流量 /
- 阻隔性 /
- 结合力
Abstract: Vacuum reactive evaporation coating technology was used to deposit AlOx+Al+AlOx on the surface of PET(polyethylene terephthalate).It improves the traditional evaporative coating equipment,and a uniform gas pipe was introduced to control the oxygen inlet position and flow rate.The influence of oxygen flow rate on film morphology,binding force,and barrier properties during reactive evaporation was studied.SEM,EDS,3M standard tape,and oxygen permeator were used to characterize thin films.The results show that the AlOx+Al+AlOx/PET composite film can effectively improve the barrier properties,compactness,and binding force between the coating and the film.The AlOx+Al+AlOx/PET composite film was vapor-deposited under the background vacuum of 8×10-4Pa,reaction pressure of 1×10-2Pa,current of 80 A,transition layer oxygen flow rate of 50 m L/min,cap layer inflation flow rate of 100 mL/min.The binding force between film layers was 1.52 N/mm,and the oxygen transmission rate was 1.1 cm3/(m2·day·atm).Compared with the traditional aluminum film,the binding force was increased by 2 times,and the barrier property was increased by 4.5 times. -
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