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基于石墨烯本征缺陷的新型漏孔组件的制作

Newleak Artifact Based on Monolayer Graphene Membrane with Intrinsic Defects

  • 摘要: 提出了一种利用单层石墨烯薄膜及其缺陷制作漏孔组件的方法。通过化学沉积法制得单层石墨烯薄膜后将其转移至多孔烧结不锈钢的薄片上,并使用拉曼光谱对石墨烯膜缺陷进行表征。氢气、氮气和氩气的流导值通过自制的测试装置由差压法进行了测定。测试结果表明即使在大气压下这三种气体在漏孔中仍然处于分子流状态。这意味着只要知道某种气体的流导,其他种类气体的流导值也可以由此得到确定。并且,本文的结果可以为很多二维平面膜材料(例如石墨烯)在漏孔制作方向提供更为广阔的应用前景。

     

    Abstract: A new leak artifact based on monolayer graphene membrane with intrinsic defects is proposed.The monolayer graphene, synthesized via chemical vapor deposition method, is transferred onto a porous sintered stainless steel disc and characterized using Raman spectra.The conductance of He, N2,and Ar is measured employing our home-made test apparatus based on the difference method.The measured conductance implies that the transport of three types of gas enters molecular flow regime at pressures of up to 105Pa.Hence, the flow conductance of any other gas could be determined in case obtaining the conductance of one certain gas.Furthermore, these results also provide porous two-dimensional plain membrane material, such as graphene, with a new application orientation in fabrication of leak artifact.

     

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