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Mo含量对Mo-Mn法陶瓷金属化层性能的影响

刘伟, 王利双, 胡守亮

刘伟, 王利双, 胡守亮. Mo含量对Mo-Mn法陶瓷金属化层性能的影响[J]. 真空科学与技术学报, 2021, 41(6): 571-575. DOI: 10.13922/j.cnki.cjvst.201904011
引用本文: 刘伟, 王利双, 胡守亮. Mo含量对Mo-Mn法陶瓷金属化层性能的影响[J]. 真空科学与技术学报, 2021, 41(6): 571-575. DOI: 10.13922/j.cnki.cjvst.201904011
LIU Wei, WANG Lishuang, HU Shouliang. The Effect of Mo Content on the Properties of Mo-Mn Metallized Layer[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(6): 571-575. DOI: 10.13922/j.cnki.cjvst.201904011
Citation: LIU Wei, WANG Lishuang, HU Shouliang. The Effect of Mo Content on the Properties of Mo-Mn Metallized Layer[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(6): 571-575. DOI: 10.13922/j.cnki.cjvst.201904011

Mo含量对Mo-Mn法陶瓷金属化层性能的影响

详细信息
    通讯作者:

    刘伟,E-mail:15983688707@163.com

  • 中图分类号: TG

The Effect of Mo Content on the Properties of Mo-Mn Metallized Layer

  • 摘要: 采用丝网印刷法在氧化铝陶瓷表面制备了活性Mo-Mn金属化层,研究了Mo含量对烧结后金属化层的微观结构、元素成分以及钎焊后抗拉强度的影响。研究结果表明,Mo-Mn法陶瓷金属化层以Mo为骨架结构,玻璃相填充于骨架结构内部,随着膏剂中Mo含量的增加,烧结后的金属化层中Mo骨架与玻璃相成分并无较大变化,而Mo骨架体积占比增加,玻璃相体积占比相应减少。烧结过程中陶瓷和金属化层二者玻璃相之间相互迁移,陶瓷玻璃相向金属化层中迁移深度可达20μm以上,玻璃相中Si元素在金属化层表面存在一定程度的偏析现象。50wt%、70wt%和85wt% Mo含量膏剂制备的金属化层平均抗拉强度分别为110 MPa、120 MPa和111 MPa,表明Mo含量为70wt%时封接性能最佳。
    Abstract: An active Mo-Mn metallized layer was prepared on the alumina surface by screen printing. The effect of Mo content on the microstructure,element composition,and tensile strength of the sintered layer was studied. The results show that Mo was taken as the metallized layer's skeleton,and the glass phase was filled in the skeleton structure. With the increase of Mo content,the composition of the Mo skeleton structure and glass phase had no change,but the volume proportion of the Mo skeleton structure increased,and the volume proportion of the glass phase reduced. In the sintering process,there was a migration phenomenon between the glass phase of the ceramic and the metallized layer. The migration depth of the ceramic's glass phase can reach more than 20 μm. The segregation phenomenon of Si on the surface of the Mo-Mn metallized layer was observed. The average tensile strength of the metallized layer prepared with 50 wt%,70 wt%,and 85 wt% Mo content was 110 MPa,120 MPa,and 111 MPa,which indicated the Mo-Mn metallized layer with 70 wt% Mo content showed the best sealing performance.
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出版历程
  • 收稿日期:  2019-04-14
  • 网络出版日期:  2023-09-11

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