Abstract: The plasma-material interaction(PMI) simulator has been successfully developed to create an environment in fusion reactor.The PMI simulator mainly comprises the Micro Wave Electron Cyclotron Resonance(MWECR) plasma source,ultrahigh vacuum chamber,magnetic fields generated by exciting-coils and permanent magnets,diagnostic and control units.The high density ECR plasma,confined in an inverted cone by magnetic fields and energized by a negatively biased structure,is capable of providing an ion beam flux of 2.5×10²¹/m²·s with the well-controlled incident ion-energy in 0~100 eV range and a single-test irradiation dose of ≥10²⁶/m².The test results show that the MWECR plasma source can regularly generate,in continuous wave and pulsed modes,a variety of plasma,including hydrogen,deuterium,argon,helium and nitrogen,and satisfy the stringent design requirements.We suggest that the self-developed PMI simulator be of some technological interest in development of materials science.