Abstract:
The automatic pumping-speed measurement technique was developed for turbo molecular vacuum pump.The self-designed software was compiled on the basis of LabVIEW platform and the hardware included a host computer,a RS485 interface converter,a PID control circuit capable of controlling the pressure gauge,gas flow-rate and environment temperature.The new pumping-speed measurement scheme was tested with a typical molecular pump by pumping N
2 gas in the pressure range of interest.The test results show that when it comes to measurement of pumping speed in real time,the newly-developed automatic technique outperforms the conventional manual evaluation method because of higher precision,better automation,easier operation,greater stability/reliability,stronger robustness,faster measurement/analysis and less human impact.We suggest that the novel automatic pumping speed measurement scheme be of some technological interest in industrial application and/or automation of molecular vacuum pump.