Automatic Pumping Speed Measurement of Molecular Pump: An Instrumentation Study
-
摘要: 针对当前分子泵抽速测试装置自动化程度低,压强实验点难以调节等问题,设计出一套分子泵抽速自动测试软件,以LabVIEW为软件开发平台,采用RS485通信实现对真空计、气体质量流量控制计、温度控制仪的数据采集和设备控制;采用PID控制方法调节气体质量流量控制计的通气量,实现对压强实验点的稳定控制;采用继电型PID参数自整定技术提高算法对系统的适应性、该软件提高了分子泵抽速测量工作中数据采集和压强调节的自动化程度,减少了人员操作对测量过程的影响,使测试过程更加科学规范,对分子泵抽速测试技术研究和应用具有一定参考价值。Abstract: The automatic pumping-speed measurement technique was developed for turbo molecular vacuum pump.The self-designed software was compiled on the basis of LabVIEW platform and the hardware included a host computer,a RS485 interface converter,a PID control circuit capable of controlling the pressure gauge,gas flow-rate and environment temperature.The new pumping-speed measurement scheme was tested with a typical molecular pump by pumping N2 gas in the pressure range of interest.The test results show that when it comes to measurement of pumping speed in real time,the newly-developed automatic technique outperforms the conventional manual evaluation method because of higher precision,better automation,easier operation,greater stability/reliability,stronger robustness,faster measurement/analysis and less human impact.We suggest that the novel automatic pumping speed measurement scheme be of some technological interest in industrial application and/or automation of molecular vacuum pump.
-
Keywords:
- Molecular Pump /
- Pumping Speed Testing /
- LabVIEW /
- Self-tuning of PID
-
-
[1] 巴德纯,王晓冬,刘坤,等.现代涡轮分子泵的进展[J].真空,2010,47(4):1-6 [2] 梁文升,张世伟,张志军,等.扩散真空泵性能自动测试系统的研制[J].真空,2009,46(6) [3] 卢耀文,陈旭,李得天,等.便携式真空计校准装置[J].真空科学与技术学报,2013,33(05):462-467 [4] 卢耀文,陈旭,李得天,等.复合型便携式真空计校准装置[J].真空,2013,50(03):1-5 [5] 卢耀文.分子泵性能参数测试装置[A].中国真空学会2014学术年会论文摘要集[C].中国真空学会,2014:2 [6] 俞宙,李静,魏亚峰,等.基于虚拟仪器的高速混合信号自动测试系统设计[J].仪器仪表学报,2016,(s1):94-101 [7] Liu C,Xu L,Cao Z.Measurement of Nonuniform Temperature and Concentration Distributions by Combining Line-of-Sight Tunable Diode Laser Absorption Spectroscopy with Regularization Methods[J].Applied Optics,2013,52(20):4827
[8] Wagner C,Armenta S,Lendl B.Developing Automated Analytical Methods for Scientific Environments Using LabVIEW[J].Talanta,2010,80(3):1081-1087
[9] 郭北涛,柳洪义,曹阳,等.基于虚拟仪器技术的电磁阀综合特性测控系统[J].仪器仪表学报,2010,31(2):293-298 [10] 孙屹博,王晓东,佘东生,等.基于虚拟仪器的高载条件下MEMS动态测试系统[J].仪器仪表学报,2009,30(1):29-34 [11] 杨乐平,李海涛,杨磊.LabVIEW程序设计与应用(2版)[M].北京:电子工业出版社,2005 [12] 王晓,张宝怀.基于LabVIEW的换热器性能试验装置测控系统的开发[J].机械工程学报,2009,45(4):309-312 [13] 耿国磊,别红霞.基于LabVIEW的高阻自动测量系统[J].电子测量与仪器学报,2009,23(3):70-75 [14] 杨清宇,巨林仓.一种非线性PID控制算法及其在玻璃窑炉液位控制上的应用[J].工业仪表与自动化装置,2000,(6):42-45 [15] 潘帅,杨平,ShuaiP,等.基于继电反馈的PID自整定控制技术进展[J].上海电力学院学报,2008,24(2):132-135 [16] 杨智,陈雨琴,YANGZhi,等.基于LabVIEW的PID自整定控制器设计[J].化工自动化及仪表,2015,(11):1188-1191
计量
- 文章访问数: 26
- HTML全文浏览量: 17
- PDF下载量: 13
下载:
