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一种10~5～10-7 Pa现场真空计校准装置的设计

Self-Developed Portable Calibration Apparatus of Vacuum Gauge with 10~5 Pa～10-7 Pa Range:An Instrumentation Study

    摘要
  • 摘要: 针对现场真空校准需求,设计出校准范围为105~10-7 Pa的现场真空计校准装置。装置集成了比较和标准流导两种校准方法,采用模块化设计减小了装置的体积和重量;通过触摸屏或计算机实现自动化数据采集及操作控制,装置能够自动出具并上传校准证书;校准室通过特殊工艺处理及双极串联抽气机组抽气,设计的极限真空度为10-8Pa量级;采用流导法和定容法设计出10-2~10-10 Pa·m3/s的复合型标准气体流量计,解决了宽量程标准流量的提供问题。本现场真空校准装置设计的校准范围为105~10-7 Pa,外形尺寸不超过500 mm×500 mm×600 mm,主体重量小于50 kg,具有校准范围宽、便携、自动化程度高等优点。

     

    Abstract: A novel type of portable automatic calibration apparatus has been successfully developed for the on-site calibration of vacuum gauge in(105~10-7) Pa range.The self-developed mobile calibrator,comprising the ultrahigh vacuum(UHV) chamber in 10-8Pa base-pressure,double-pole molecular pump,lab-built compound standard gas flowmeter operating by flow and constant-volume methods in 10-2~10-10 Pa·m3/s range,host-computer and/or LCD touchscreen monitor,integrated the comparison and standard conductance calibration methods by means of modularization design.The prototyped vacuum gauge calibrator,500 mm×500 mm×600 mm in size and 5 kg in gross-weight,was extensively tested.The results show that the calibrator is capable of covering a wide range from 1×105 Pa to 5×10-7 Pa.We suggest that the newly-developed vacuum gauge calibrator be of increasing market demands and of much economic impact because of the wide calibration range,high automation and reasonable portability.

     

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