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高频高压低温等离子体发生研究

Generation of Low Temperature Plasma at High-Frequency and High-Voltage: An Experimental Study

  • 摘要: 针对传统气体放电式等离子体发生器电源效率不高、使用寿命有限等问题,提出了一种零电压软开关高频高压低温等离子体发生方法,并设计了一个高效率低损耗的高频高压低温等离子体发生系统。该系统通过移相全桥软开关控制电路提供控制信号,光耦隔离电路降低强电干扰,在零电压软开关驱动下,经高频谐振升压电路对输入信号升压,实现低温等离子体的稳定发生。实验结果表明,系统工作频率稳定在262kHz,系统能够稳定发生低温等离子体,等离子体束长可达13.1cm,系统工作稳定后,零电压软开关系统的效率为87.4%,与传统直流等离子体发生炬最高77%效率相比,提高了10.4%,实现了驱动管耗的降低和输入电源效率的提升。

     

    Abstract: A novel plasma source,capable of generating low temperature plasma at high frequency and high voltage,was developed to overcome the limitations of the conventional gas discharge plasma source,such as low power efficiency and short service life.The newly-designed plasma source comprised the full-bridge phase-shift soft-switching control,optocoupler isolation,zero-voltage switch and high-frequency resonant circuit.The prototyped plasma generator was tested.The results show that the new plasma generator outperforms the conventional DC plasma generator.To be specific,the steady low temperature plasma at 262 kHz could be regularly generated;the plasma length reached 13.1 cm.In addition,the efficiency of zero-voltage soft switching in steady state was 87.4%,being 10.4% higher than that of the conventional DC plasma generator,indicating a reduction of energy consumption and an enhancement of power supply efficiency.

     

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