大气压射频单介质阻挡放电中放电通道收缩现象的研究
Mechanism for Discharge-Channel Contracting in RF Single Dielectric Barrier Discharge at Atmospheric Pressure: An Experimental Study
-
摘要: 大气压射频辉光放电产生的等离子体具有温和的温度、较好的稳定性和较强的化学活性而广泛应用于工业生产、生物处理等领域。为提高工作效率、增加放电均匀性, 应避免产生放电收缩现象。为此, 设计了一个带水冷铜电极的射频单介质阻挡放电系统, 在大气压下研究氮气和氩气放电收缩形成的机制。纳秒级ICCD相机拍摄的放电图像揭示出在大气压下氮气和氩气放电中明显存在放电通道收缩现象, 在放电周期内放电通道形状保持不变, 但在不同位置的发光强度随射频电源的频率作周期性变化。通过分析放电图像的三维时空分辨图和二维时间分辨图, 发现上下电极表面附近的发光强度在一个射频周期内交替出现一个峰, 但峰出现时间上为非对称。这不同于射频裸电极放电, 也不同于射频双介质阻挡放电。分析认为发光强度峰在一个射频周期内交替出现的时间非对称性是由于非对称电极表面电荷积累和二次电子发射差异造成。Abstract: The mechanism responsible for discharge channel contracting in RF single dielectric barrier discharge (RF-SDBD) at atmospheric pressure was investigated by using lab-built RF-SDBD device, which composed of a powered brass electrode covered by fused-silica as a dielectric layer and a grounded brass electrode cooled by recycled water.The discharge channel contracting in atmospheric nitrogen/argon mixtures was explored with nano-second intensified charge coupled device (ns-ICCD) camera.The discharge channel shape remained unchanged, but the intensity of light emission was changed periodically with the cycle of RF power.It was noticed from spatio-temporal image and temporally resolved image that the intensity peak of light emission near the upper electrode and the bottom electrode alternately appeared during one cycle of RF, but the time interval between the two peaks was not equal to one half cycle of RF.This phenomena was quite different from discharge channel formation in RF discharge with bared electrodes, or RF double dielectric barrier discharge.We suggested that the significant differences of deposited charges and secondary electron emission between the surfaces of the upper brass electrode and the dielectric covered the bottom electrode under non-symmetric electrode structure may explain the discharge channel contracting in RF-SDBD.