高电压阳极层霍尔离子源三维数值仿真与设计
Design of High-Voltage Anode Layer Hall Ion Source: A 3D Simulation Study
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摘要: 对于阳极层霍尔离子源装置本身, 宽能、大束流、低气耗及低污染等指标是新一代装置的研发方向。基于拓宽装置放电电压范围的考虑, 针对装置现有结构, 进行了三维数值仿真建模。在现有装置的结构设计基础上, 对装置磁路及结构设计进行修改, 从而实现了对装置工作性能的提高。改进后的阳极层霍尔离子源放电电压范围在原有基础上扩展了50%以上, 放电电压上限可以达到3000 V。改进后的装置在高电压、低气压、小电流的放电条件下运行稳定, 仿真结果对装置的实际加工制造具有一定参考意义。Abstract: The operation of anode layer Hall ion source was empirically approximated, mathematically modeled and numerically simulated in particle-in-cell and Monte-Carlo collision method for design optimization.The influence of the source structure and magnetic circuit on the discharge voltage range and stability was investigated.The simulated results show that the heightened magnetic field confinement makes the difference.To be specific, the modified magnetic field increases the discharge voltage range of the ion source by 50%, approaching an upper limit of 3000 V;and the newly-designed anode layer Hall ion source is capable of operating routinely and stably under the conditions of high voltage, low gas pressure and low current.We suggest that the simulated results be of some technological interest in design optimization and fabrication of anode layer Hall ion source.