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YAO Mingjing, ZHANG Kejia, ZHANG Hong, HUANG Yi, TANG Guoqing, DAN Min, JIN Fanya. Effect of Sputtering Pressure on Structure Regulation and Electrocatalytic Performance of MoS2 Coatings[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202509015
Citation: YAO Mingjing, ZHANG Kejia, ZHANG Hong, HUANG Yi, TANG Guoqing, DAN Min, JIN Fanya. Effect of Sputtering Pressure on Structure Regulation and Electrocatalytic Performance of MoS2 Coatings[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202509015

Effect of Sputtering Pressure on Structure Regulation and Electrocatalytic Performance of MoS2 Coatings

  • MoS2 exhibits a distinctive electronic configuration akin to that of platinum, it is considered as a potential catalyst for transition metal sulfide hydrogen evolution reaction (HER). Nevertheless, the catalytic efficiency of MoS2 in hydrogen evolution is hampered by insufficient active sites and inadequate electrical conductivity. This study presents a technique for fabricating MoS2 coatings as an electrocatalyst for HER using magnetron sputtering. The microstructure, microstructure morphology and HER activity in alkaline media of MoS2 coatings were investigated by preparing MoS2 coatings at different argon pressures of 0.5 Pa, 1.0 Pa, 1.5 Pa and 2.0 Pa. Results show that the MoS2 coating grows along the (100) crystal surface under different Ar pressures, exposing most of the active sites. At the same time, 1T phase MoS2 appears in the coatings at low Ar pressure, and the 1T phase component is the most at 1.0 Pa, and the conductivity is stronger. In a 1 mol/L potassium hydroxide (KOH) solution, the overpotential of the coating at current densities of 10 mA/cm2 and 100 mA/cm2 is 149 mV and 225 mV, respectively, and the Tafel slope is 75 mV·dec−1.
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