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GUAN Yong, ZHANG Zhengquan. Simulation of Electromagnetic Properties in Inductively Coupled Plasma[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202502011
Citation: GUAN Yong, ZHANG Zhengquan. Simulation of Electromagnetic Properties in Inductively Coupled Plasma[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202502011

Simulation of Electromagnetic Properties in Inductively Coupled Plasma

  • This study develops an electromagnetic model of inductively coupled plasma (ICP) to explore its electromagnetic transmission properties under varying discharge conditions, supporting plasma stealth technology. Plasma parameters are derived from hydrodynamic simulations to ensure model accuracy. Simulations of ICP's reflection and absorption spectra reveal that adjusting gas pressure, gas ratio, and power effectively controls attenuation bands and amplitudes, suppressing radar reflection signals. O-ICP absorbs strongly below 6 GHz, while Ar-ICP is more efficient at 6−14 GHz. Increasing pressure or power shifts absorption peaks to higher frequencies and broadens the absorption range. Additionally, ICP excited by anti-phase currents shows lower cutoff frequencies and weaker absorption than in-phase currents.
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