New High-Speed CP1250Xe Composite Cryopump

In this study, a novel large pumping speed CP1250Xe composite cryopump has been successfully designed. Through structural optimization, the pumping speed of Xe has been significantly increased, and it is capable of effectively pumping out conventional gases such as N₂ and H_2. The experimental results show that the pumping speed of Xe for this cryopump is as high as 65000 L/s, and the pumping speeds for N₂ and H₂ reach 60000 L/s respectively. The hydrogen pumping capacity is 150 L. These achievements confirm the remarkable advantages of the novel large pumping speed CP1250Xe composite cryopump in enhancing the pumping speed of xenon gas, solving the problem that the Xe pumping speed of traditional cryopumps fails to reach the desired value, and meanwhile, it has the ability to pump conventional gases, providing strong technical support for vacuum acquisition.