Dynamic Vacuum Maintenance Performance of Zr-V-Fe Getters

The getter is crucial for the long-term maintenance of vacuum in sealed spaces. Changes in environmental conditions can cause significant variations in the adsorption and desorption characteristics of the getter material, affecting the vacuum level. Therefore, studying the dynamic vacuum maintenance characteristics of getters under varying temperatures is of significant importance. This paper uses a differential pressure method to heat Zr-V-Fe getters with different saturation levels in a sealed space to investigate the effects of getters’ saturation and temperature on the dynamic vacuum performance of the sealed space. The experimental results indicate that the getter can effectively maintain the chamber’s vacuum for an extended period under increasing temperatures. The higher the getter’s saturation level, the smaller the internal space available for gas absorption, leading to worse vacuum maintenance performance. Under a certain critical temperature, higher temperatures accelerate gas diffusion rates, enhancing the getter’s adsorption performance and improving maintenance capability. This study contributes to a deeper understanding of getters’ vacuum maintenance performance and provides theoretical and experimental support for optimizing and enhancing passive vacuum systems.