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WANG Tianpeng, ZHENG Kang, GU Dandan, LV Wenlong, SONG Yunkang, WANG Lingyun. Molecular Dynamics Simulation and Verification of the Improvement of Getter Performance by Porous Scaffold[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(12): 1052-1058. DOI: 10.13922/j.cnki.cjvst.202406008
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Getters play a vital role in maintaining the vacuum of MEMS devices. Currently, a common method to improve the performance of getters is to deposit getters on porous scaffolds with large specific surface areas. In order to verify the significant role of porous structure in improving getter performance, the molecular dynamics simulation software Lammps was used to simulate the adsorption behavior of thin film getters and getters with porous scaffolds. The simulation results show that the adsorption capacity of the getter with a porous scaffold is 2.69 times that of the thin film getter. A layer of Ti getter was deposited on the surface of silicon and porous nickel scaffolds using the magnetron sputtering method, and the adsorption capacity of both was tested using the thermogravimetric method. The results show that the adsorption amount of the getter with porous nickel scaffold (0.5961 mg) is 2.11 times that of the thin film getter (0.2829 mg). Gas adsorption tests were conducted on the two types of getters using the constant pressure method. The getter capacity of the Ti getter with porous nickel scaffold (2.16×10−3 Pa∙ml/cm2) is 3.2 times that of the thin film Ti getter (6.74×10−4 Pa∙ml/cm2).
| [1] |
Cho J, Gregory J A, Najafi K. High-Q, 3 kHz single-crystal-silicon cylindrical rate-integrating gyro (CING)[C]//2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2012: 172−175
|
| [2] |
Nitzan S, Ahn C H, Su T H, et al. Epitaxially-encapsulated polysilicon disk resonator gyroscope[C]//2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2013: 625−628
|
| [3] |
Kullberg R C, Lowry R K. Hermetic package leak testing revisited[C]//IMAPS International Conference and Exhibition on Device Packaging, 2008
|
| [4] |
林四英. 可感应加热激活型多孔纳米支架基吸气剂的制备及性能探究[D]. 厦门大学, 2023 (in Chinese)
Lin S Y. Preparation and properties of porous nanostent-based getter activated by induction heating[D]. Xiamen university, 2023
|
| [5] |
吴华亭. Zr-Co-Ce吸气剂薄膜的制备与性能研究[D]. 北京有色金属研究总院, 2019 (in Chinese)
Wu H T. Preparation and properties of Zr-Co-Ce getter films[D]. Beijing General Research Institute of Nonferrous Metals, 2019
|
| [6] |
Anton B, Dahir G, Sergei T, et al. The study of different structuring techniques for creation of non-evaporable getters[J]. Materials Sciences and Applications. 2013, 4: 57–61
|
| [7] |
Basu A , Perez M A , LF Velásquez-García. Nanostructured silicon field emitter array-based high-vacuum magnetic-less ion pump for miniaturized atomic spectroscopy sensors[C]. 18th international conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015). IEEE, 2015
|
| [8] |
Cao Q, Wang X Y, Wang S H, et al. Development and characterization of an improved Ti-Zr-V thin-film getter with 3D porous nano-scaffolds[J]. Vacuum,2023,209:111747 doi: 10.1016/j.vacuum.2022.111747
|
| [9] |
周超, 李得天, 周晖, 等. MEMS器件真空封装用非蒸散型吸气剂薄膜研究概述[J]. 材料导报,2019,33(03):438−443 (in Chinese)
Zhou C, Li D T, Zhou H, et al. Research on non-evaporative getter films for vacuum packaging of MEMS devices[J]. Materials Review,2019,33(03):438−443
|
| [10] |
单睿, 齐通通, 黎秉哲, 等. 非蒸散型薄膜吸气剂的研究现状及应用进展[J]. 功能材料,2018,49(05):5049−5055 (in Chinese)
Shan R, Qi T T, Li B Z, et al. Research status and application progress of non-evapotranspiration thin film getter[J]. Functional Materials,2018,49(05):5049−5055
|
| [11] |
顾玉明. 氮气在分子筛中吸附性质的理论研究[D]. 南京大学, 2019 (in Chinese)
Gu Y M. Theoretical study on adsorption properties of nitrogen in molecular sieve[D]. Nanjing University, 2019
|
| [12] |
何龙庆,林继成,石冰. 菲克定律与扩散的热力学理论[J]. 安庆师范学院学报:自然科学版,2006,12(4):2(in Chinese) doi: 10.3969/j.issn.1007-4260.2006.04.014
He L Q, Lin J C, Shi B. Fick's law and the thermodynamics theory[J]. Journal of anqing teachers college: natural science edition,2006,12(4):2 doi: 10.3969/j.issn.1007-4260.2006.04.014
|
| [13] |
任俊豪, 任晓海, 宋海强, 等. 基于分子模拟的纳米孔内甲烷吸附与扩散特征[J]. 石油学报,2020,41(11):1366−1375 (in Chinese) doi: 10.7623/syxb202011006
Ren J H, Ren X H, Song H Q, et al. Characterization of methane adsorption and diffusion in nanopore based on molecular simulation[J]. Acta Petrolei Sinica,2020,41(11):1366−1375 doi: 10.7623/syxb202011006
|
| [14] |
Wang T, Zheng K, Gu D, et al. Performance enhanced Ti-based thin film getter with porous nickel as scaffold[J]. Vacuum,2024,224:113150 doi: 10.1016/j.vacuum.2024.113150
|
| [15] |
Shi Y, Zhang L, Zhang Y, et al. Construction of a hierarchical porous surface composite electrode by dynamic hydrogen bubble template electrodeposition for ultrahigh-performance thermally regenerative ammonia-based batteries[J]. Chemical Engineering Journal,2021,423:130339 doi: 10.1016/j.cej.2021.130339
|
| [16] |
杨瑞山. 气泡模板法制备多孔镍的研究[D]. 吉林大学, 2022 (in Chinese)
Yang R S. Bubble template preparation of porous nickel research [D]. Jilin university, 2022
|
| [17] |
Plowman B J, Jones L A, Bhargava S K. Building with bubbles: the formation of high surface area honeycomb-like films via hydrogen bubble templated electrodeposition[J]. Chemical Communications,2015,51(21):4331−4346 doi: 10.1039/C4CC06638C
|
| [18] |
ASTM. ASTM F798-97 Standard practice for determining gettering rate, sorption capacity, and gas content of nonevaporable getters in the molecular flow region[S]. West Conshohocken: ASTM, 2002
|
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