Sputter Coating Unit Vacuum System Design and Pumping Performance Prediction

In order to make the ultimate vacuum of the sputter coating unit reach 5 \times 10^ - 4 \,\, \mathrmP\texta and improve its evacuation efficiency, a new design of the vacuum system of the sputter coating unit is proposed. Based on the MOLFLOW+ software, the ultimate vacuum of the designed vacuum system is verified, which is better than 2.7 \times 10^ - 4 \,\, \mathrmP\texta . A pumping calculation model of the vacuum system of the sputter coating unit is established, and the pumping curves are obtained by solving the model and comparing the results with those of the real machine test, which show that the deviation of the pumping curves obtained by the model from the experimental test values is less than 5%, which can be used for the performance analysis of the high-vacuum system.