Service No
| Citation: |
LI Yulong, LI Wei, WANG Xianyi, CAO Qing. Preparation and Characterization of Titanium-Zirconium-Vanadium Non-Evaporable Getter Film Based on Porous Silicon Scaffold[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(7): 570-576. DOI: 10.13922/j.cnki.cjvst.202402010
|
The non-evaporable getter film has been extensively researched and applied in the field of vacuum technology in recent years. However, its further development is hindered by limited adsorption rate and capacity. In this study, a porous silicon scaffold was prepared using the double-tank electrochemical corrosion method, followed by the deposition of non-evaporable titanium-zirconium-vanadium (Ti-Zr-V) getter film through DC magnetron sputtering to obtain three-dimensional (3D) film getter. The morphology and gas adsorption performance of the film getter were investigated using high-resolution field emission scanning electron microscopy, thermogravimetric analyzer, and hydrogen adsorption test, respectively. The results of the hydrogen adsorption performance test revealed that films with a thickness of 400 nm deposited on both silicon wafer and porous silicon exhibited maximum adsorption rates of 0.035 L·s−1·cm−2 and 0.100 L·s−1·cm−2, representing an increase of 185.71%. Furthermore, their respective adsorption capacities were measured as 0.143 Pa·L·cm−2 and 0.353 Pa·L·cm−2 which increased by 146.85%. Depositing the film on a porous silicon scaffold enhanced the specific surface area and porosity of the film getter, thereby increasing contact between gas molecules and the getter surface, leading to improved gas molecule adsorption and diffusion processes within it, thus effectively enhancing its overall adsorption performance.
| [1] |
Giorgi T A, Ferrario B, Storey B. An updated review of getters and gettering[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,1985,3(2):417−423
|
| [2] |
Santucci A, Farina L, Tosti S, et al. Novel non-evaporable getter materials and their possible use in fusion application for tritium recovery[J]. Molecules,2020,25(23):5675 doi: 10.3390/molecules25235675
|
| [3] |
Porcelli T, Puro M, Raimondi S, et al. NEG coating deposition and characterisation of narrow-gap insertion devices and small-diameter chambers for light sources and particle accelerators[J]. Vacuum,2017,138:157−164 doi: 10.1016/j.vacuum.2016.12.036
|
| [4] |
Benvenuti C, Chiggiato P, Pinto P C, et al. Vacuum properties of TiZrV non-evaporable getter films[J]. Vacuum,2001,60(1-2):57−65 doi: 10.1016/S0042-207X(00)00246-3
|
| [5] |
Diekmann L F, Kassner A, Dencker F, et al. Nonevaporable getter-MEMS for generating UHV conditions in small volumina[J]. Journal of Vacuum Science & Technology B,2022,40(5):054202
|
| [6] |
Bourim E M, Kim H Y, Chung N K. Development and characterization of non-evaporable getter thin films with Ru seeding layer for MEMS applications[J]. Micromachines,2018,9(10):490 doi: 10.3390/mi9100490
|
| [7] |
宋伊, 冯焱, 成永军, 等. 非蒸散型吸气材料研究现状及进展[J]. 中国有色金属学报,2021,31(8):2160−2170(in Chinese)
Song Y, Feng Y, Cheng Y J, et al. Research status and progress of non-evaporable getter for electronic vacuum devices[J]. The Chinese Journal of Nonferrous Metals,2021,31(8):2160−2170
|
| [8] |
Sharma R K, Sinha A K, Basak D C, et al. Surface studies and measurement of pumping characteristic of NEG coating (Ti-V-Zr)[C]//2014 International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV). IEEE, 2014: 529−532
|
| [9] |
严达利. 多孔硅基金属氧化物纳米复合材料的制备与气敏性能研究[D]. 天津大学, 2014(in Chinese)
Yan D L. Preparation and gas sensing properties research of porous silicon based metal oxide nanocomposites[D]. Tianjin University, 2014
|
| [10] |
中华人民共和国国家质量监督检验检疫总局. GB/T 25497−2010 吸气剂气体吸放性能测试方法[S]. 北京: 中国标准出版社, 2011
|
| [11] |
Cao Q, Wang X Y, Wang S H, et al. Development and characterization of an improved Ti-Zr-V thin-film getter with 3D porous nano-scaffolds[J]. Vacuum,2023,209:111747 doi: 10.1016/j.vacuum.2022.111747
|
| [12] |
Cao Q, Li Y L, Wang X Y, et al. Study of nano-scaffold on improving gettering performance of Ti-Zr-V film and the influencing mechanism[J]. Materials Today Communications,2024,39:108923 doi: 10.1016/j.mtcomm.2024.108923
|
| [13] |
Carstensen J, Christophersen M, Föll H. Pore formation mechanisms for the Si-HF system[J]. Materials Science and Engineering: B,2000,69:23−28
|
| [14] |
卢乐. P型多孔硅制备、成核机理及其光电性能调控研究[D]. 江苏大学, 2019(in Chinese)
Lu L. Preparation, nucleation mechanism and photoelectric properties control of P-type porous silicon[D]. Jiangsu University, 2019
|
| [15] |
Mahalik N P. Micromanufacturing and nanotechnology[M]. Berlin: Springer, 2006, 15: 357−381
|
| [16] |
Thornton J A. High rate thick film growth[J]. Annual Review of Materials Science,1977,7:239−260 doi: 10.1146/annurev.ms.07.080177.001323
|
| [17] |
Alvarez R, Garcia-Martin J M, Lopez-Santos M C, et al. On the deposition rates of magnetron sputtered thin films at oblique angles[J]. Plasma Processes and Polymers,2014,11(6):571−576 doi: 10.1002/ppap.201300201
|
| [18] |
徐媛媛. 磁控溅射亚稳态Cr-C涂层的结构演变和多功能性研究[D]. 中国科学院大学, 2022(in Chinese)
Xu Y Y. Structural evolution and multifunctionality of metastable Cr-C coatings prepared by magnetron sputtering[D]. University of Chinese Academy of Sciences, 2022
|
| [19] |
Šutara F, Tsud N, Veltruská K, et al. XPS and ESD study of carbon and oxygen chemistry on TiZrV NEG[J]. Vacuum,2001,61(2−4):135−139 doi: 10.1016/S0042-207X(00)00469-3
|
| [20] |
Das B K, Das R, Verma R, et al. Improvement of deuterium emission by St 172 NEG pump in a sealed off vacuum device[J]. Vacuum,2020,181:109743 doi: 10.1016/j.vacuum.2020.109743
|
| [21] |
Yoshida H. Testing of non-evaporable getter pills for standardization of their pumping performance testing method[J]. Vacuum,2022,197:110797 doi: 10.1016/j.vacuum.2021.110797
|
| [1] | TANG Lijun, WANG Jinghua, CAO Qing, WANG Xudi. Dynamic Vacuum Maintenance Performance of Zr-V-Fe Getters[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2025, 45(1): 1-7. DOI: 10.13922/j.cnki.cjvst.202408009 |
| [2] | WANG Tianpeng, ZHENG Kang, GU Dandan, LV Wenlong, SONG Yunkang, WANG Lingyun. Molecular Dynamics Simulation and Verification of the Improvement of Getter Performance by Porous Scaffold[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(12): 1052-1058. DOI: 10.13922/j.cnki.cjvst.202406008 |
| [3] | WANG Guodong, LIU Xiao, WANG Jiaolong, CAI Yangyang, ZHANG Feng, CHEN Changqi, XIE Yuanlai. Performance Analysis of a High-Performance Non-Evaporable Getter[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(6): 503-510. DOI: 10.13922/j.cnki.cjvst.202402006 |
| [4] | RONG Zhenhua, CHENG Yongjun, CHEN Lian, SUN Wenjun, DONG Meng, ZHOU Chao, FENG Tianyou, MA Zhanji. A Design of Sorption Characteristics Test Device with Two Test Stations[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(3): 243-251. DOI: 10.13922/j.cnki.cjvst.202310007 |
| [5] | WANG Jiaolong, WANG Guodong, LIU Xiao, CAI Yangyang, ZHANG Feng, CHEN Changqi, XIE Yuanlai. Simulation and Design of Test System for the Pumping Performance of NEG Pump[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(2): 139-145. DOI: 10.13922/j.cnki.cjvst.202304010 |
| [6] | XU Xiaopeng, MA Wenjing, WEI Jianya, GE Xiaoqin, FAN Le, HONG Yuanzhi, XIA Xiaowei, HUANG Tao, WANG Sihui. Vacuum Performance of Activated NEG Coatings under Neon Venting[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2023, 43(10): 819-824. DOI: 10.13922/j.cnki.cjvst.202305002 |
| [7] | WANG Lanling, LIN Wenyu, WANG Jinghua, ZHANG Jun, BI Hailin, CAO Qing, WANG Xudi. Research on the Sorption Performance Test Method of NEG by Constant Pressure Method Based on the New Constant Conductance Element[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2022, 42(12): 937-942. DOI: 10.13922/j.cnki.cjvst.202203021 |
| [8] | WANG Zhiwei, WANG Xudi, WEI Wei, WANG Sihui, DING Yunsheng. Preparation and Properties of Low Temperature Activated TitaniumZirconium-Vanadium Non-Evaporable Getter Films[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(8): 739-744. DOI: 10.13922/j.cnki.cjvst.202010005 |
| [9] | SU Tong, AI Yongchang, HUANG Shuiming, XU Kai, HOU Xueling, ZHOU Chao, LIU Xingguang. Research Situation of Non-Evaporable Getter Films for MEMS[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(7): 674-682. DOI: 10.13922/j.cnki.cjvst.202007001 |
| [10] | Yu Yang, Chen Shuping, Zhu Ming, Huang Yuwei, Bai Biaokun. Applications of Non-Evaporable Getter Materials in Cryogenic Container:A Review Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2020, 40(4): 313-317. DOI: 10.13922/j.cnki.cjovst.2020.04.05 |
Supported by: Beijing Renhe Information Technology Co., Ltd. 
DownLoad: