Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source

In this paper, a carbon nanotube electron source is applied to a highly stable ionization gauge, and a preliminary performance experimental study of the prototype is carried out. The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa⁻¹ ~ 0.245 Pa⁻¹ from 6.87×10⁻⁶ Pa to 6.45×10⁻⁵ Pa, with a maximum deviation of 20% from the simulated sensitivity of 0.250 Pa⁻¹, and the sensitivity fluctuation is less than 5.96%, which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.