Performance Analysis of a High-Performance Non-Evaporable Getter

Non evaporable getters (NEGs) are important materials for maintaining vacuum in high and ultra-high vacuum systems, with high stability and gas adsorption. This article uses the powder metallurgy method to prepare Zr_59.46V_29.81Al_10.73, and builds a high vacuum system for testing based on the small hole flow conductivity method. The effects of gas type and working temperature on the performance are tested. Through experiments, it is known that Zr_59.46V_29.81Al_10.73 has good suction performance for H₂, CO₂, and N₂, and has the best performance for H₂ , but it does not absorb inert gases such as He. At the same time, it indicates that the working temperature has a significant impact and the optimal working temperature is 200℃. The crystal phase, morphology, and composition of the adsorbent were analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS). The results showed that the surface of the alloy exhibited a porous structure, mainly composed of \mathrm\alpha -\mathrmZ\mathrmr , C15 Laves phase, and some Zr_xAl_y compound. The structures and phase components are conducive to the adsorption of gases.