Mechanical Properties of TiN/ZrN Multilayers by Arc Ion Plating

A series of TiN/ZrN multilayer films, characterized by a consistent modulation ratio and total thickness but varying numbers of periods, were meticulously fabricated through arc ion plating. This study delved into the impact of the number of periods on mechanical properties of these multilayer films. Structural and morphological analyses were conducted utilizing X-ray diffraction and scanning electron microscopy, respectively. To evaluate the mechanical and tribological attributes of the films, a battery of tests was employed, including a microhardness tester, a reciprocating friction and wear tester, and a multifunctional material surface performance tester. The findings elucidated that all multilayer films displayed a singular face-centered cubic structure featuring columnar crystal growth, a compact and smooth surface, and distinctive interface effects. The mechanical properties were intricately linked to both the interface structure and preferred orientation. Notably, at 50 periods, TiN exhibited a pronounced (200) preferred orientation, resulting in the multilayer films reaching their pinnacle hardness at 2568 Hv. Tribological properties were discernibly affected by both surface morphology and hardness. The film with 40 periods demonstrated the lowest friction coefficient at 0.47, and wear rates exhibited a decreasing trend with escalating hardness. At 50 periods, the wear rate attained an optimal value of 6.9×10⁻⁶ mm³·N⁻¹·m⁻¹, indicative of superior wear resistance.