Preparation and Properties Research of Cr and Ti Oxidation Resistant Coatings on the Surface of CeN Thin Films

A 2 μm thick CeN film was prepared on a single-crystal silicon substrate using direct current magnetron sputtering, and the oxidation behavior of CeN in ambient air was investigated. Given the susceptibility of CeN to react with oxygen in the atmosphere, leading to degradation and decomposition, various thicknesses of Ti or Cr anti-oxidation coatings were deposited on CeN to enhance its oxidation resistance. The results revealed that Ti/CeN composite films were damaged and detached when exposed to ambient air for a short time. In contrast, a 2.4 μm Cr film covered on 2 μm CeN film can effectively extend the storage time of CeN in ambient air. Finally, the oxidation mechanism of the CeN and anti-oxidation layer composite films were discussed.