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| Citation: |
RONG Zhenhua, CHENG Yongjun, CHEN Lian, SUN Wenjun, DONG Meng, ZHOU Chao, FENG Tianyou, MA Zhanji. A Design of Sorption Characteristics Test Device with Two Test Stations[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(3): 243-251. DOI: 10.13922/j.cnki.cjvst.202310007
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A test device is designed to measure the NEG properties by either the constant pressure or the constant volume method. The device has two test stations with symmetrical structures, which can pretest and test two samples at the same time. The device has a reasonable structure and high test efficiency. The test device can directly output performance parameters by software, such as sorption rate and sorption quantity. The test results show that the vacuum of the device is high, such as the vacuum of the sample chamber is better than 1×10−7 Pa, the leakage rate is less than 3×10−7 Pa·L/s, the test data of the device is high precision and reliable, such as the sorption rate measurement accuracy is 1 mL/s, the sorption quantity measurement accuracy is 1 Pa·mL.
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