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WANG Kun, LI Jian, WANG Shiqing, JIN Fanya, DAN Min, ZHANG Shuang. Atmospheric Capillary Plasma Electrode Discharge Based on Porous Anodic Alumina[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2023, 43(10): 863-869. DOI: 10.13922/j.cnki.cjvst.202306011
Citation: WANG Kun, LI Jian, WANG Shiqing, JIN Fanya, DAN Min, ZHANG Shuang. Atmospheric Capillary Plasma Electrode Discharge Based on Porous Anodic Alumina[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2023, 43(10): 863-869. DOI: 10.13922/j.cnki.cjvst.202306011

Atmospheric Capillary Plasma Electrode Discharge Based on Porous Anodic Alumina

  • Dielectric barrier discharge and capillary plasma electrode discharge based on porous anodic alumina were compared and analyzed through experiments and simulations. A layer of porous anodic alumina (PAA) was prepared on the surface of aluminum plates using the anodizing method. The effect of the porous anodic alumina dielectric layer on capillary plasma electrode discharge was studied. The processes of dielectric barrier discharge and capillary plasma electrode discharge with the same geometric parameters were compared and analyzed. It is shown that the capillary plasma electrode discharge with porous anodic alumina is more stable. Dense micro discharge paths generated in the discharge are helpful to improve the stability. The capillary plasma electrode discharge of porous anodic alumina has two orders of magnitude higher electron density and higher electron temperature than the dielectric barrier discharge. Plasma parameters have a periodicity with the distribution of pores on the porous anodic alumina, which results in the plasma jet mode and improves the discharge stability.
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