Numerical Simulation of the Characteristics of Dual Frequency Ar/O₂ Discharge Plasma at Atmospheric Pressure

Based on the plasma fluid theory, the effects of high-frequency source frequency in dual frequency capacitive coupling discharge on the various particles’ density and plasma parameters of argon oxygen mixture discharge plasma at atmospheric pressure were studied. We simulate the discharge in different high-frequency source frequencies and have achieved the one-dimensional space-time distribution of the various particles’ density, electron temperature, electric field and other parameters, and a better understanding of the influence of high-frequency source frequency on plasma characteristics in dual frequency discharge. The results show that when the discharge voltage is fixed, the electron density increases with the increase of the high-frequency source frequency; The electron temperature, electric field and potential have a downward trend; The density of various argon ions and sub argon atoms increases with the increase of high-frequency source frequency; With the increase of high-frequency source frequency, the density of various oxygen ions increases, the density of oxygen atoms decreases first and then increases, and the metastable density of oxygen molecules increases first and then decreases. Electronic pressure heating, electronic ohmic heating, electronic heating and energy loss are gradually increased due to the influence of high-frequency source frequency. In addition, the effective current density and effective power density generally increase with the increase of high-frequency source frequency.