Research and Application Analysis of Vacuum Coating Technology Based on Literature Data Visualization

The popularity and breadth of the application of a technology are closely related to its technical advantages, maturity, applicability, etc. Through the analysis of the research and application of vacuum coating technology in the world based on literature data visualization, this paper explores the application scope and attention degree of this technology and provides a useful reference for the development of vacuum coating technology and the equipment industry. The results show that the Ion Beam Sputtering(IBS), Ion beam Assisted Deposition(IAD), Plasma ion-assisted Deposition(PIAD), and Atomic Layer Deposition(ALD) technologies are the focus of attention at present and in the future.