Pumping Characteristics of Curved Blades of Turbomolecular Pump

Turbomolecular pump is widely used in the semiconductor and thin film industry,nuclear physics,and surface science.It is the core mechanical equipment to obtain an ultra-high vacuum environment.Based on the machinability of the integrally formed turbine rotor,this paper proposes a structural improvement scheme for the turbine blade and uses the two-dimensional model and the three-dimensional model to evaluate the performance of the improved structure:under the same geometric structure,the ho coefficient of the two-dimensional model is slightly higher than that of the three-dimensional model,and the compression ratio is slightly lower than that of the three-dimensional model.The improved model not only solves the machinability of the turbine blade root,but also improves its maximum ho coefficient and maximum compression ratio to a certain extent.