Design of a Reconfigurable Control System Based on the Requirement of Magnetron Sputtering Devices

An automatic control system based on Siemens PLC and LABVIEW was designed to improve the adaptability of magnetron sputtering devices to different process requirements.The system does not solidify the specific process flow but provides the process flow editing interface and the function of parsing and executing the userdefined process data,so as to realize the reconfiguration of the process.This paper completes the design of the system's hardware architecture,software programming and HMI based on actual needs.It has been verified through practice that process reconfiguration is of great help in improving the process adaptability of equipment.