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WANG Wanping, LIU Kai, TIAN Jianjun, LIU Xiansheng, KANG Chaoyang. Study on the Preparation and Room-Temperature Ferromagnetic of Binary Manganese-Vanadium Oxide Thin Films[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2022, 42(6): 442-447. DOI: 10.13922/j.cnki.cjvst.202201006
Citation: WANG Wanping, LIU Kai, TIAN Jianjun, LIU Xiansheng, KANG Chaoyang. Study on the Preparation and Room-Temperature Ferromagnetic of Binary Manganese-Vanadium Oxide Thin Films[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2022, 42(6): 442-447. DOI: 10.13922/j.cnki.cjvst.202201006

Study on the Preparation and Room-Temperature Ferromagnetic of Binary Manganese-Vanadium Oxide Thin Films

  • In this work, magnetic vanadium oxide(VOx) thin films were prepared on sapphire substrates by RF magnetron sputtering. The effects of codeposition of Mn on the surface morphology and ferromagnetism of VOx were investigated. The results of structure and morphology characterization show that the VOx film prepared by us is a kind of pure vanadium oxide film with a stoichiometric ratio between V2O3 and VO2. The introduction of Mn element causes slight distortion of VOxlattice, and the morphology of VOx evolves from a nano-rod structure to a spherical structure. The results of magnetic properties show that VOx films exhibited room-temperature ferromagnetic properties. With the ratio of Mn to V being 1:1, the saturation magnetic moment of the film first increases and then decreases. When the Mn content is 30%, the surface morphology is the most regular, and the maximum saturation magnetic moment is 345 emu/cm3.
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