Effect of DC Magnetron Sputtering on the Properties of Thin Films Deposited on the Surface of Shaped Workpieces

For shaped workpieces with complex surface shapes,the shadowing effect during the deposition process can cause non-uniform film thickness and differences in surface properties and structure,which can lead to surface failure and reduced service life during application.In order to obtain a uniform film thickness on the surface of shaped workpieces,this paper uses the DC magnetron sputtering coating method and the single factor variable method to prepare films on the inner surface of shaped workpieces at different working air pressures and substrate temperatures.The thickness uniformity and surface morphology of the prepared films were examined using a step meter and SEM,respectively.The results show that,within a certain range of working air pressure and substrate heating temperature,the process parameters can be changed effectively to improve the thickness uniformity and surface quality of the deposited films.The thickness uniformity of the Au film on the inner surface of the workpiece increased as the working air pressure was gradually increased,reaching±3%when the working air pressure was raised to 1.5 Pa.When the substrate temperature was raised to 400℃,the thickness uniformity of the deposited film reached±5%,and the film surface was flat and crack-free.