Design of Multi-Parameter Condition Monitoring System for Ultra-High Vacuum Valve on Beam Line

The good operation state of the beam line is an important guarantee for the user's normal experiment and the safe operation of the storage ring.Based on the existing beam line control system of HLS,this paper studies the condition monitoring system for ultra-high vacuum valve by a variety of sensors.A multi-parameter condition monitoring system for ultra-high vacuum has been developed for key equipment of beam line in National Synchrotron Radiation Laboratory.At the same time,the status database is established by EPICS (Experimental Physics and Industrial Control System) and realizes the remote data sharing.Due to the implementation of the system,the diagnosis ability and maintenance level of equipment for beam line is enhanced.