Research Progress of Molecular Vacuum Pump

Molecular vacuum pump is a kind of vacuum devices for producing and maintaining clean high/ultra-high vacuum conditions, and widely used in industrial and scientific applications duo to its high operating reliability and pumping performances. Recent years, the development of numerical control machining, active magnetic bearings and simulation methods, make it possible to improve the pumping performances of molecular vacuum pump even further. This paper summarizes the research progress based on the basic issues of molecular vacuum pump design and prospects for future developments of the prediction accuracy of pumping performances at high blade speeds.