Citation: | XIA Zongyu, WANG Xudi, BI Hailin, ZHOU Bin, LAI Canxiong. Transient Simulation of Gas Sampling Process in Micro Enclosed Space[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(11): 1019-1024. DOI: 10.13922/j.cnki.cjvst.202107004 |
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