Service No
Advanced Search
XIA Zongyu, WANG Xudi, BI Hailin, ZHOU Bin, LAI Canxiong. Transient Simulation of Gas Sampling Process in Micro Enclosed Space[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(11): 1019-1024. DOI: 10.13922/j.cnki.cjvst.202107004
Citation: XIA Zongyu, WANG Xudi, BI Hailin, ZHOU Bin, LAI Canxiong. Transient Simulation of Gas Sampling Process in Micro Enclosed Space[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(11): 1019-1024. DOI: 10.13922/j.cnki.cjvst.202107004

Transient Simulation of Gas Sampling Process in Micro Enclosed Space

More Information
  • Received Date: July 07, 2021
  • Available Online: September 11, 2023
  • In this paper, direct simulation Monte Carlo method with simplified Bernoulli trails collision scheme was used to simulate the transient process of gas detection in a micro cavity(0.001 cc). The results show that the pressure in the sampling chamber decreases exponentially. The pressure change of the sampling chamber has little effect on the conductivity of the gas mixture in the capillary. The partial pressure of the ionization chamber decreases approximately linearly when it reaches the maximum value. During the simulation, the partial pressure ratio of the gas in the ionization chamber changes greatly. Moreover, there is a big error in the gas partial pressure ratio between the ionization chamber and the sampling chamber. A method to correct the gas partial pressure ratio by using the flow conductance of each component of the gas mixture is presented in the paper. The modified partial pressure ratio is in good agreement with the theoretical value.
  • [1]
    Kullberg R C,Rossiter D J.Measuring Mass Flows in Hermetically Sealed MEMs & MOEMs to Ensure Device Reliability[C].Reliability,Packaging,Testing,and Characterization of MEMS/MOEMS VII.Oneida Research Services,Inc.8282 Halsey Road,Whitesboro,NY13492,2008
    [2]
    Valougeorgis D,Vargas M,Naris S.Analysis of Gas Separation,Conductance and Equivalent Single gas Approach for Binary Gas Mixture Flow Expansion Through Tubes of Various Lengths into Vacuum[J].Vacuum,2016,128:1-8
    [3]
    White C,Borg M k,Scanlon T J,et al.Dsmc Foam+:An Open FOAM Based Direct Simulation Monte Carlo Solver[J].Computer Physics Communications,2018,224:22-43
    [4]
    Spencer R L,Krogel J,Palmer J,et al.Modeling the Gas Flow Upstream and in the Sampling Nozzle of the Inductively Coupled Plasma Mass Spectrometer Via the Direct Simulation Monte Carlo Algorithm[J].Spectrochimica Acta Part B Atomic Spectroscopy,2009,64(3):215-221
    [5]
    Garimella S,Zhou X,Ouyang Z.Simulation of Rarefied Gas Flows in Atmospheric Pressure Interfaces for Mass Spectrometry Systems[J].Journal of The American Society for Mass Spectrometry,2013,24(12):1890-1899
    [6]
    Waits R K,Brucker G A,Raby B A,et al.Recommended Practice for Process Sampling for Partial Pressure Analysis[J].Journal of Vacuum Science & Technology a Vacuum Surfaces and Films,2007,25(1):167-186
    [7]
    Farber K,Farber P,J Gräbel,et al.Development and Validation of a Coupled Navier-Stokes/DSMC Simulation for Rarefied Gas Flow in the Production Process for OLEDs[J].Applied Mathematics & Computation,2015,272(P3):648-656
    [8]
    Abhimanyu G,Amit A,Upendra B.Study of Rarefied Gas Flows in Backward Facing Micro-Step Using Direct Simulation Monte Carlo[J].Vacuum,2018,155:249-259
    [9]
    Roohi E,Stefanov S.Collision Partner Selection Schemes in DSMC:From Micro/Nano Flows to Hypersonic Flows[J].Physics Reports,2016,656:1-38
    [10]
    Wei N,Feng Y,Sun W,et al.Experimental Study on the Conductance of Pure and Binary Gas Mixtures[J].Vacuum,2021,189(5):1102

Catalog

    Article views (28) PDF downloads (11) Cited by()

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return