Database of Secondary Electron Yield and Energy Spectra for Dielectric Samples by Electron Irradiation

Characteristics of secondary electron emission from dielectric materials by electron irradiation are critical to the performance of vacuum electronic devices and equipment. In this work,secondary electron yield(SEY)and energy spectra were measured for 22 kinds of dielectric samples. By the negatively biased secondary electron collector for neutralizing charges accumulated in the sample during electron irradiation,SEY was measured by using a single pulsed electron gun. Secondary electron spectra at different primary energy of electrons were obtained by a high resolution electron spectrometer in successive electron pulse irradiation. Parameters describing the SEY curves as the maximum SEY σ_max,the first and secondary cross energy E₁ and E₂,and the full width at half maxima(FWHM)of true secondary electrons in the spectra were given. Based on the measurements,the database of secondary electron yield and spectra for typical dielectric samples was established,which could provide valuable information to related applications.