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LI Yu, GUO Meiru, BA Dechun, ZHOU Mingxu, LI Gang, XI Zhenhua, WANG Xiaodong. The Research History of Spinning Rotor Gauge[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(11): 1009-1018. DOI: 10.13922/j.cnki.cjvst.202105018
Citation: LI Yu, GUO Meiru, BA Dechun, ZHOU Mingxu, LI Gang, XI Zhenhua, WANG Xiaodong. The Research History of Spinning Rotor Gauge[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(11): 1009-1018. DOI: 10.13922/j.cnki.cjvst.202105018

The Research History of Spinning Rotor Gauge

  • pinning rotor gauge is widely used in various fields and has high accuracy at 10-4-1 Pa. It occupies an important position with its superior performance and is widely used for transmission standard. However, residual drag seriously affects the lower limit expansion of the spinning rotor gauge, among which the eddy current effect is the most significant. Compared with the eddy current effect, the relaxation effect and Coriolis effect can be ignored. This paper briefly introduces the structure and principle of the spinning rotor gauge, summarizes the research history of the spinning rotor gauge, and focuses on the related research on residual drag and tangential momentum accommodation coefficient. And this paper analyzes the influence of some important factors on them. The research on residual drag mainly introduces the eddy current effect, temperature effect, relaxation effect, Coriolis effect and vibration. In terms of tangential momentum accommodation coefficient, the influence of gas type and pressure on it is mainly explained. At last, some improvement conjectures and future research directions are proposed.
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