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CAI Xiaoming, XU Ganjun, HAO Zhenliang, HUANG Wentian, CAI Jinming, WU Zhangyong. Design and Analysis of Production Equipment for Preparing Graphene Powder by Bubbling Chemical Vapor DepositionJ. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(10): 969-974. DOI: 10.13922/j.cnki.cjvst.202103015
Citation: CAI Xiaoming, XU Ganjun, HAO Zhenliang, HUANG Wentian, CAI Jinming, WU Zhangyong. Design and Analysis of Production Equipment for Preparing Graphene Powder by Bubbling Chemical Vapor DepositionJ. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(10): 969-974. DOI: 10.13922/j.cnki.cjvst.202103015

Design and Analysis of Production Equipment for Preparing Graphene Powder by Bubbling Chemical Vapor Deposition

  • According to the preparation process of graphene powder by bubble chemical vapor deposition, aset of production equipment was designed. The equipment is composed of a production system and a collection sys-tem. The production system includes heating device, air inlet device and support device, which can reduce impuri-ties and realize continuous production of "cold wall". The collecting system consists of collecting pipe, collectingcontainer and air pump, and adopts series graded variable cross-section settlement collection. Finite element analy-sis is used to analyze and simulate the actual working conditions of the equipment in the aspects of steady-statethermal, thermo-solid coupling strength, topology optimization and flow field.
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